摘要 |
<p>A semiconductor testing apparatus capable of monitoring a test log such as the number of relay operations, and a monitor device for the apparatus. The semiconductor testing apparatus tests a device to be measured, by controlling individual test circuits with the signal information of a bus. The apparatus comprises solution means for monitoring a test log, the means including a plurality of buffers for writing the signal information of said bus alternately, and a computer for reading the signal information of the buffers alternately to store the read information as a file and to analyze the stored information.</p> |