发明名称 Sensing apparatus and method of producing same
摘要 <p>A sensing apparatus for sensing the proximity of an object has a sensing element (X2A,X2B) and a signal conditioner (S8) produced from the same semiconductor wafer with the signal conditioner being positioned on one surface of the wafer and the sensing element being positioned on the side so that the sensing element is generally at right angles to the signal conditioner. The signal conditioner and sensing element are electrically interconnected via integrated conductive pads (4a-4d: 8a-8d) and conductive surface traces (2a-2d: 6a-6d). &lt;IMAGE&gt;</p>
申请公布号 EP1164357(A2) 申请公布日期 2001.12.19
申请号 EP20010203046 申请日期 1996.06.06
申请人 WOLFF, PETER, U.;SMITH, MARSHALL, E., JR. 发明人 WOLFF, PETER, U.;SMITH, MARSHALL, E., JR.
分类号 G01B15/00;G01B7/00;G01D5/12;G01D5/14;G01D5/16;G01D5/20;G01D5/245;G01D5/249;G01D5/48;G01S3/782;G01S13/74;G01V3/10;G01V3/12;(IPC1-7):G01D5/14 主分类号 G01B15/00
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