APPARATUS AND METHOD FOR INSPECTING PLANAR-MOUNTED TYPE SEMICONDUCTOR DEVICE, AND THE SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To enable highly accurate measurement by reducing the effect of the inductance of contact parts of a tester. SOLUTION: A contact socket used heretofore is eliminated, and an external lead 10 of a planar-mounted type semiconductor device 6 is brought into direct contact with a second wiring board.