LASER ANNEAL in-situ FILM QUALITY EVALUATING SYSTEM

摘要

PROBLEM TO BE SOLVED: To measure the Raman spectrum at a micro part with high sensitivity in the laser anneal process of an amorphous film. SOLUTION: A hole is made through an objective lens and a film is irradiated with excimer laser light through the hole. At the same time, YAG laser light is focused at a sample through the objective lens and Raman light is collected.