| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and method for testing semiconductor devices, capable of testing an output waveform having small pulse width and of reducing the cost required in the test apparatus. SOLUTION: Test signal generating parts (14, 15, 16, 18) for generating a prescribed test signal and a comparison judging part (11, 17) for continuously comparing the value of the output signal from the semiconductor device device- under-test(DUT) 2 with a prescribed set value for a constant period to judge the quality of the DUT are provided to the DUT 2. In the comparison judging part (11, 17), the output signal during the constant period is compared with the set value, and when the value of the output signal does not exceed the set value through a fixed period, for example, the DUT 2 is judged to be poor. When there is a value of the output signal exceeding the set value during the fixed period, the DUT 2 is judged to be satisfactory.
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