| 摘要 |
PROBLEM TO BE SOLVED: To provide a soft magnetic material, which does not contain a gas element such as N, O or the like difficult in control in an atmosphere in sputtering and is manufactured easily and in which stable soft magnetic characteristics can be obtained and which has excellent soft magnetic characteristics in a high-frequency range and large saturation magnetization. SOLUTION: The soft magnetic material having a texture, in which high melting point compound ultrafine particles consisting of M and Ge and α-Fe microcrystalline phase coexist, by including one kind or more of Mg, Ca, Ti, Zr, Hf, V, Nb, Ta, Sc, Y and rare earth elements and Ge to one kind or more of Fe, Co and Ni at fixed ratios and which has excellent soft magnetic characteristics in the high-frequency range and large saturation magnetization, is obtained. |
