APPARATUS FOR TRANSFERRING SEMICONDUCTOR WAFER,申请号KR20000030980-传众专利搜索

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发明名称	APPARATUS FOR TRANSFERRING SEMICONDUCTOR WAFER
摘要
申请公布号	KR20010110511(A)	申请公布日期	2001.12.13
申请号	KR20000030980	申请日期	2000.06.07
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	BAE, JONG IN;KIM, BONG SU
分类号	(IPC1-7):H01L21/68	主分类号	(IPC1-7):H01L21/68
代理机构		代理人
主权项
地址

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