| 摘要 |
The sensor includes a device associated with a proof mass (120) for its deflecting in a direction away from a second electrode (114) such that the proof mass is deflected away from it in absence of an electrostatic force on the proof mass. A device is provided for sensing strain induced by a deflection of the proof mass relative to the second electrode and for producing an output signal from them. A device is provided for controlling the electrostatic force generated by the second electrode based on the output signal of the strain sensing device. The controlling device serves to return the proof mass to a null position relative to the second electrode when the proof mass is deflected from the null position. The deflecting device counteracts the electrostatic force between the proof mass and the second electrode in the energised state, such that the proof mass to be maintained at the null position in the energised state. |
