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发明名称
PLASMA ETCHER
摘要
申请公布号
KR20010109771(A)
申请公布日期
2001.12.12
申请号
KR20000030395
申请日期
2000.06.02
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KOO, DO SEO
分类号
(IPC1-7):H01L21/306
主分类号
(IPC1-7):H01L21/306
代理机构
代理人
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