SILICON BOAT AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a silicon boat that inhibits the contamination of a silicon wafer caused by the silicon boat when the wafer is heat-treated, and the occurrence of slippage, and the manufacturing method of the silicon boat. SOLUTION: Face plates 12a and 12b made of silicon, and a post 13 made of the silicon are washed with HF to remove a surface oxide film. After that, the boat parts 12a, 12b, and 13 are combined for assembling the silicon boat. Then, a silicon boat 11 is subjected to hydrogen annealing treatment at a heating temperature of 1100 deg.C or higher for at least one hour. The annealing treatment is made in a hydrogen gas, thus preventing a silicon oxide film from being formed on the surface of the boat parts 12a, 12b, and 13. In addition, annealing treatment is made at a temperature of 1100 deg.C or higher for at least one hour, thus fusing the surface layer of the connection part between the face plates 12a and 12b and post 13, and hence obtaining the silicon boat 11 where the members 12a, 12b, and 13 are integrated.