发明名称 METHOD FOR MANUFACTURING HEAD SLIDER AND HARD DISK DRIVE HAVING HEAD SLIDER
摘要 PROBLEM TO BE SOLVED: To decrease the fluctuations of a head slider having plural level difference parts and to shorten the period from design to product application. SOLUTION: The method for manufacturing the head slider having a plurality of the level difference parts 3 and 5 formed by ion milling, reactive ion etching, etc., in which, in forming the one level difference part 5 among a plurality of the level difference parts, the mispositioning and/or depth deviation from the design value of the level difference part 3 formed before the one level difference part 5 is measured and the one level difference part 5 is formed by shifting its position to the position where the deviation in the floating height produced by this mispositioning and/or depth deviation is offset. The level difference parts are formed sequentially from the level difference parts which exert the most significant influence on the floating characteristics of the head slider among a plurality of the level difference parts described above.
申请公布号 JP2001338411(A) 申请公布日期 2001.12.07
申请号 JP20000153364 申请日期 2000.05.24
申请人 HITACHI LTD 发明人 AMATATSU ATSUSHI;ENDO MASAYOSHI;ATSUMI MASAHIRO
分类号 G11B5/60;G11B21/21;(IPC1-7):G11B5/60 主分类号 G11B5/60
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