| 摘要 |
PROBLEM TO BE SOLVED: To match and evaluate an image display of a detected defect and an actual specimen and easily confirm a state in the periphery of the defect by clearly displaying images in the periphery of the defect regardless of an inspection range of line CCD cameras which separate the specimen. SOLUTION: When an area image of a desired region of the specimen is to be displayed as an area image including the defect image when the defect image is detected by separately imaging images on one line of the specimen by a plurality of the line CCD cameras, storing and preserving imaging signals by each of the line CCD cameras as image data in corresponding storage means, and taking image data corresponding to the desired region of the object from the corresponding storage means into an image display means, if image data of an effective visual field of one line CCD camera is not sufficient and image data of an effective visual field of an adjacent line CCD camera is also required as peripheral image data to be displayed with including the defect image, peripheral area images including the defect image are linked and displayed with the use of the image data of the both line CCD cameras on the basis of data of a link part of effective visual field regions of the adjacent line CCD cameras.
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