SEMICONDUCTOR ACCELERATION SENSOR

摘要

PROBLEM TO BE SOLVED: To make a temperature characteristic relating to the detection of acceleration hard to deteriorate. SOLUTION: This semiconductor acceleration sensor includes an acceleration sensor chip 1 having a beam-shaped deflecting part extended therefrom, with a weight part 13 supported against the end of the deflecting part by integral molding, the weight part being displaced by acceleration; a first cap 2 joined to one face of the acceleration sensor chip 1 to face the weight part 13; and a second cap 4 joined to the other face of the acceleration sensor chip 1 in such a manner as to face the weight part 13 from the side opposite to the first cap 2. The acceleration sensor chip 1 is formed with a recessed stress- relieving part 18 for relieving stress being provided on at least either one or the other face thereof.