发明名称 CATHODE CARTRIDGE OF ELECTROPLATING TESTING APPARATUS, AND ELECTROPLATING TESTING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a cathode cartridge of an electroplating testing apparatus capable of forming a uniform plating film. SOLUTION: This cathode cartridge to be used in the electroplating testing apparatus comprises a plate-like cathode conductor 4 which is opened in a shape of a plating surface 2a of a work 2 to be plated which is a cathode plate, has a plurality of projections 4 abutted on a circumferential edge of the plating surface 2a, and is exposed connectable to a DC power source at a portion not immersed in electrolyte, a rear side plate-like insulator 5 which covers a rear side of the work 2 and the rear side of the cathode conductor 4 and has a groove with the work 2 and the cathode conductor 4 fitted therein, a front side insulator 6 which is opened in a shape of the plating surface 2a and covers the front side of the cathode conductor 4, and an elastic thin plate 3 which is held between the work 2 and the rear side insulator 5, and possibly further comprises a dummy plate 5 forming a cathode provided on the outer side of the front side insulator 6.
申请公布号 JP2001335996(A) 申请公布日期 2001.12.07
申请号 JP20000152342 申请日期 2000.05.24
申请人 YAMAMOTO MEKKI SHIKENKI:KK 发明人 YAMAMOTO WATARU
分类号 C25D7/12;C25D17/06;C25D17/08;C25D17/10;C25D17/12;C25D21/10;C25D21/12;H01L21/288 主分类号 C25D7/12
代理机构 代理人
主权项
地址
您可能感兴趣的专利