SENSOR ELEMENT AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To prevent a movable body from adhering to a substrate surface and a lid member surface. SOLUTION: The movable body such as a plane vibrator 3 or connection beams 4a and 4b that form an angular velocity sensor 1 is movably stored and sealed in a sensor storing space 28 formed with a substrate (glass substrate) 26 and a lid member (glass substrate) 27. A substrate region 30a and a lid member region 31a facing to the movable body at an interval have rough surfaces with roughness Ra not less than 0.3 μm by a sand blast machining. Even when an impact is applied by dropping to contact the movable body with the facing part, the movable body does not adhere to the substrate or the lid member to certainly prevent adhering problem of the movable body. Occurrence of a failure that the adhesion of the movable body causes malfunction of the angular velocity sensor 1 is suppressed.