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发明名称
CHEMICAL VAPOR DEPOSITION EQUIPMENT
摘要
申请公布号
KR20010107138(A)
申请公布日期
2001.12.07
申请号
KR20000028382
申请日期
2000.05.25
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
CHO, SEONG HO;KANG, YEONG HO
分类号
C23C16/54;(IPC1-7):C23C16/54
主分类号
C23C16/54
代理机构
代理人
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地址
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