发明名称 |
Cart for mounting/demounting wafer transfer robot |
摘要 |
An object of the present invention is to provide a wafer transfer robot mount/demount cart for simply mounting and demounting a wafer transfer robot which is linearly, substantially horizontally reciprocated in a wafer transfer apparatus to transfer wafers. A pair of mount/demount cart-side rails 9 which can be connected to a pair of wafer transfer apparatus-side guide rails mounted inside a wafer transfer apparatus D is mounted on a raised portion 5 of the mount/demount cart A. A joint rail S is mounted in a gap between the pair of wafer transfer apparatus-side rails and the pair of mount/demount cart-side rails 9 so as to slide a wafer transfer robot R onto the pair of mount/demount cart-side rails 9 via the joint rail S.
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申请公布号 |
US2001048871(A1) |
申请公布日期 |
2001.12.06 |
申请号 |
US20010870728 |
申请日期 |
2001.06.01 |
申请人 |
SASAKI YOSHIAKI;HIROOKA TAKAAKI;HAGIHARA SHUJI |
发明人 |
SASAKI YOSHIAKI;HIROOKA TAKAAKI;HAGIHARA SHUJI |
分类号 |
B62B3/04;H01L21/677;(IPC1-7):B65G49/07 |
主分类号 |
B62B3/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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