发明名称 Semiconductor device
摘要 The invention relates to a semiconductor device comprising a bond pad structure, which bond pad structure enables analyses to be carried out at a level of a metal layer of the semiconductor device and comprises a matrix comprising trenches filled with a conductive material, which matrix is electrically contacted by the metal layer.
申请公布号 US2001048105(A1) 申请公布日期 2001.12.06
申请号 US20010829860 申请日期 2001.04.10
申请人 VAN DE GOOR ALBERTUS THEODORUS MARIA 发明人 VAN DE GOOR ALBERTUS THEODORUS MARIA
分类号 H01L21/66;H01L21/3205;H01L21/60;H01L23/485;H01L23/52;(IPC1-7):H01L23/58 主分类号 H01L21/66
代理机构 代理人
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