发明名称 Multi-gas analysis system for analyzing high-purity gases
摘要 There are provided an apparatus for analyzing gases and a gas analyzing method which can securely detect presence and absence of leakage in a short time and which can carry out analyses successively, safely and accurately in a stable state. The apparatus for analyzing gases is provided with sample gas introducing systems (1 to 5) for introducing a plurality of sample gases selectively, and analyzers (6, 10 and 14), and also has means (9) for monitoring, when a sample gas under determination is changed over to another sample gas, change in the concentration of the sample gas component introduced before the change over.
申请公布号 US6324892(B1) 申请公布日期 2001.12.04
申请号 US19990445398 申请日期 1999.12.07
申请人 NIPPON SANSO CORPORATION 发明人 NISHINA AKIRA;KIKUCHI TSUTOMU;TANAKA MAKOTO;YOSHIDA HIDETOSHI;KIMIJIMA TETSUYA
分类号 G01N27/62;G01N1/00;G01N1/26;G01N30/02;G01N30/04;G01N30/26;G01N30/72;G01N30/88;H01J49/04;(IPC1-7):G01N3/04;H01J49/02 主分类号 G01N27/62
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