INTERVAL MEASURING METHOD AND SENSOR FOR MEASURING INTERVAL

摘要

PROBLEM TO BE SOLVED: To achieve accurate determination of intervals from a reference surface and the height of a convex part when a surface has projections and recesses concerning an interval measuring method and a sensor for measuring interval from a measured electrostatic capacitance. SOLUTION: Intervals (a) between an electroconductive substrate 1 having the projection and recess 2 on a surface and a part 3 are varied by a known value and an electrostatic capacitance is measured at two or more of the intervals (a). The results of the measurement are compared to an expression of the electrostatic capacitance determined by an approximate expression obtained by the modelling of the projection and recess 2 on the surface of the electroconductive substrate 1 to determine the intervals (a).