| 摘要 |
PROBLEM TO BE SOLVED: To enhance the detection accuracy of a sensor element such as an angular-velocity detecting element or the like. SOLUTION: A vibrator 20 which is installed so as to be levitated on a substrate 10 is vibrated in the X-axis direction by drive electrode parts 51-1 to 51-4. The vibration in the Y-axis direction of the vibrator 20 by the Coriolis force due to an angular velocity around the Z-axis is detected by detection electrode parts 53-1 to 53-4. Lengths, widths and thicknesses of wiring parts 51b1 to 51b4 which are connected to fixed electrodes 51a1 to 51a4 of the parts 51-1 to 51-4 as well as lengths, widths and thicknesses of wiring parts 53b1 to 53b4 which are connected to the parts 53-1 to 53-4 are made identical. Thereby, electric characteristics of the respective wiring parts 51b1 to 51b4, 53b1 to 53b4 which have an identical function are made identical. |
