| 摘要 |
An electrostatically driven microstructure device comprises a substrate having a principal surface and at least one main beam suspended over the principal surface. Each end of the main beam is connected to an addressing connection beam. The addressing connection beam is anchored to the substrate. A connection beam electrode is coupled to the addressing connection beam, and a corresponding static electrode is provided, whereby the electrodes are adapted to apply electrostatic forces to the connection beam and/or act as a mechanical stopper for at least one connection beam. The electrostatic forces applied to the connection beam may be controlled, so that the main beam may move between a stretched position and an end buckling position. In order to prevent 'stiction' problems, the electrodes are positioned so that no mechanical contact is provided between the addressing connection beam electrode and the corresponding static electrode during operation. A method for addressing a matrix structure of devices is provided. |
