发明名称 FLOATING CHUCK FOR TFT-ARRAY MANUFACTURING PROCESS
摘要 It is described a process for the production of porous non-evaporable getter materials comprising at least one first element selected between Zr and Ti and at least one second element among V, Cr, Mn and Ni, wherein the starting metal powders are produced by reduction with calcium hydride of the corresponding oxides and the thus obtained powders are compacted and sintered at a value of pressure and temperature in a given range; also described are getter materials that, due to the production process, have a novel distribution of chemical composition through the getter body resulting in an improved combination of mechanical and gas-sorption properties.
申请公布号 KR20010105780(A) 申请公布日期 2001.11.29
申请号 KR20000026696 申请日期 2000.05.18
申请人 LG.PHILIPS LCD CO., LTD. 发明人 KIM, CHEOL SE;KIM, SEONG HUI
分类号 G02F1/136 主分类号 G02F1/136
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