发明名称 High k interconnect de-coupling capacitor with damascene process
摘要 An integrated circuit (IC) including integral, high k dielectric de-coupling capacitor constructed using a damascene process and contained within a single conductive layer of the IC structure. The IC comprises a substrate, a dielectric layer disposed over the substrate, and a conductive layer disposed over the dielectric layer. The conductive layer includes a first line disposed adjacent to a second line, and a high k dielectric material disposed between the first line and the second line. The capacitor is formed between the first line and the second line separated by the high k dielectric material. Coupling the first line to a signal and coupling the second line to a capacitor signal connects the capacitor.
申请公布号 US6323099(B1) 申请公布日期 2001.11.27
申请号 US20000497015 申请日期 2000.02.02
申请人 ADVANCED MICRO DEVICES 发明人 LONG WEI;XIANG QI
分类号 H01L21/02;(IPC1-7):H01L21/20 主分类号 H01L21/02
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