LAMINATED FILM AND METHOD OF FORMING LAMINATED FILM

摘要

PROBLEM TO BE SOLVED: To provide a laminated film which is formed by laminating a metal oxide thin film and a metal thin film alternately in a number of layers on a base and which is useful as a transparent conductive thin film or a heat wave reflecting film disposed in front of PDP and is of low resistance and excellent in conductivity. SOLUTION: In the laminated film of the metal oxide thin film 2 and the metal thin film 3 formed on the base 1, a layer 4 of an oxide of the metal constituting the metal thin film is formed on the interface of the metal thin film 3 with the metal oxide thin film 2. In the method of forming the laminated film wherein the metal oxide thin film 2 and the metal thin film 3 are formed by laminating the base 1 with a sputtering process, the layer 4 of the oxide is formed by exposing the metal thin film 3 to an oxygen gas atmosphere after this film is formed.