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发明名称
METHOD FOR MANUFACTURING THIN FILM OF RUTHENIUM AND RUTHENIUM OXIDE
摘要
申请公布号
KR20010103264(A)
申请公布日期
2001.11.23
申请号
KR20000024586
申请日期
2000.05.09
申请人
POSTECH FOUNDATION
发明人
KIM, JU YEONG;LEE, JEONG HYEON;LEE, SI U
分类号
(IPC1-7):H01L21/205
主分类号
(IPC1-7):H01L21/205
代理机构
代理人
主权项
地址
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