Process for producing nitrogen doped semiconductor wafers,申请号EP20000117291-传众专利搜索

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发明名称	Process for producing nitrogen doped semiconductor wafers
摘要
申请公布号	EP1081254(B1)	申请公布日期	2001.11.21
申请号	EP20000117291	申请日期	2000.08.17
申请人	WACKER SILTRONIC<BR>GESELLSCHAFT FUER HALBLEITERMATERIALIEN AKTIENGESELLSCHAFT	发明人	VON AMMON, WILFIED, DR.;WEIDNER, HERBERT;ZEMKE, DIRK, DR.;FREY, CHRISTOPH, DR.
分类号	H01L21/208;C30B13/00;C30B13/10;C30B15/00;C30B15/04;(IPC1-7):C30B15/04;C30B29/06	主分类号	H01L21/208
代理机构		代理人
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