发明名称 Fast luminescent silicon
摘要 There are provided mesoporous silica materials containing in their pores stabilized clusters of silicon atoms, of size 2 nanometers or less, and capable of photoluminescence to emit fast photons. They are prepared by chemical vapour deposition of silicon or a silicon precursor such as disilane, under soft conditions such as temperature of 100-150° C., into the mesopores of silicate films which have mesoporous channels prepared by growth of the films using a template to control their sizes, but without removing the template residues from the films prior to the chemical vapour deposition. The template residues serve to limit the size of the silicon clusters which conform. The use of the soft conditions on CVD retains the template residues in an intact, substantially unchanged form. The resultant films have clusters of silicon, of 2 nanometer size or less, anchored to the mesopores, and air stable, so that they can be used in optoelectronic devices in conjunction with standard silicon semiconductors.
申请公布号 US6319427(B1) 申请公布日期 2001.11.20
申请号 US20000499305 申请日期 2000.02.07
申请人 OZIN GEOFFREY A.;DAG öMER;YANG HONG 发明人 OZIN GEOFFREY A.;DAG öMER;YANG HONG
分类号 H01L21/205;H01L27/15;H01L33/34;(IPC1-7):C09K11/56 主分类号 H01L21/205
代理机构 代理人
主权项
地址