发明名称 CONTACTLESS HOLDING DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To confirm the state of a contactless holding device positively holding a workpiece. SOLUTION: This contactless holding device is constituted by forming the internal space of an arm-like base body E as a cushion chamber, providing the upper part of the cushion chamber 4 with a nozzle 2 for blowing high speed air P, forming a holding face 4 at a face, opposed to a workpiece, of a peripheral wall 1, and providing the peripheral wall 1 with a pressure detecting tube 5 piercing the cushion chamber 3.</p>
申请公布号 JP2001322080(A) 申请公布日期 2001.11.20
申请号 JP20000145838 申请日期 2000.05.18
申请人 AKASHI HIROSHI 发明人 AKASHI HIROSHI
分类号 B65G49/07;B25J15/06;H01L21/677;H01L21/68;(IPC1-7):B25J15/06 主分类号 B65G49/07
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