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经营范围
发明名称
DOUBLE POLISHING HEAD
摘要
申请公布号
SG84546(A1)
申请公布日期
2001.11.20
申请号
SG19990004478
申请日期
1999.09.13
申请人
CHARTERED SEMICONDUCTOR MANUFACTURING LTD
发明人
QUEK SER WEE
分类号
B24B27/00;B24B37/04;(IPC1-7):B24B1/00
主分类号
B24B27/00
代理机构
代理人
主权项
地址
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