| 发明名称 |
Method for making oxide |
| 摘要 |
A method of forming oxide and gate oxide areas of differing thicknesses. The processes disclosed include using an electromagnetic wave light at differing exposure durations and/or different energy levels to create oxide of differing thicknesses on a layer. The electromagnetic wave is preferably a laser.
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| 申请公布号 |
US6319759(B1) |
申请公布日期 |
2001.11.20 |
| 申请号 |
US19980131828 |
申请日期 |
1998.08.10 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
FURUKAWA TOSHIHARU;HAKEY MARK C.;HOLMES STEVEN J.;HORAK DAVID V.;MA WILLIAM H. |
| 分类号 |
H01L21/268;H01L21/28;H01L21/316;H01L21/8234;(IPC1-7):H01L21/00;H01L21/26;H01L21/336 |
主分类号 |
H01L21/268 |
| 代理机构 |
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代理人 |
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