Miniature piezoelectric translators for optical applications

摘要

A piezoelectric translator has a flat ribbon geometry and a large translation length perpendicular to the surface of the bridge. The translator includes a platform supporting the optic or micro-optic element and a slender piezo actuation system for displacing the platform. A position sensing system provides feedback to the actuation system regarding displacement of the platform. The actuation system includes a plurality of bridge actuators wherein each actuator includes a flat piezoelectric ribbon and leaf spring cap bonded to the ribbon, in single- or double-sided geometry. A stacked bridge geometry is also provided and allows increased displacement for a given applied voltage. Two collinearly placed single span bridge actuators or two-span bridge actuators can be used to provide linear translations with micro-rotation control.