| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device having high detection precision, capable of preventing the influence of a formation spot of a test body, and detecting a defect even if the defect having very little difference in reflectance between itself and the test body exists. SOLUTION: This inspection device has a reflector 1 installed close to the test object 2, an illumination device 3 for illuminating the test object 2 from the opposite direction to the reflector 1, a sensor 5 for receiving reflected light from the test object 2 illuminated from the illumination device 3, and having a filter 4 installed on the front and having a color having low transmissivity in a wavelength region other than a defect absorption wavelength, and an image processing device 6 for processing a detection signal of the sensor 5, and detecting the defect included in the test object 2.
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