LUMINESCENCE ANALYSIS METHOD AND APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a means for specifying a luminescent transistor position from the influence on a luminescence shape observed from the surface of the semiconductor and estimating the luminescence shape. SOLUTION: A three-dimensional location relation around a luminescent position is reproduced from layout data, and the luminescent point is shifted thereby. Then a location in which the luminescent point agrees with the real luminescent image shape is obtained, and the accuracy in agreement is enhanced by changing the luminescent shape.