| 摘要 |
PROBLEM TO BE SOLVED: To reduce a Q value of resonance of a probe by taking Q/ωas a parameter into a design item in a scanning-type scanning probe microscope. SOLUTION: A means for minimizing the Q value of the resonance of the probe is used as a means for reducing an inherent mechanical relaxation time of the probe required for changing kinetic energy of vibration of the probe following scanning on the sample surface, by increasing a force for damping vibration of a lever 1 by enlarging the surface area of a face 1c on the side having the probe 2 of the lever 1.
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