| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and apparatus for measuring a circuit pattern line width, which enable reduction in measuring errors of line width and shorten ing of the processing time, without requiring a large capacity memory. SOLUTION: The apparatus for measuring a circuit pattern line width has an image acquisition circuit 21 for taking in an image from an input device, a binary coding circuit 22, a fine line processing circuit 23, a segment extraction circuit 26, a measuring straight line generation circuit 27 for calculating a straight line passing through a coordinate value subjected to the measurement of line width, an edge point searching circuit 28 for searching contour edge points, a local subpixel processing circuit 29 which performs a subpixel processing, by division into N×N which is confined to the contour edge points and the vicinity thereof and further, a smoothing processing of subpixel image data for the removal of noises and a line width measuring circuit 30, which determines a position on a straight line and indicating a gray value exceeding a binary coded threshold from output data of the local subpixel processing circuit to calculate the line width from the position.
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