REDUCED PRESSURE AND NORMAL PRESSURE TREATER

摘要

PROBLEM TO BE SOLVED: To provide a reduced pressure and normal pressure treater which shortens the time between the processes between a treatment in a normal pressure process and a treatment in a reduced pressure process and reduces the number of times of handling the bodies. SOLUTION: A reduced pressure and normal pressure treater is constituted in a structure that a reduced pressure treating part 100 provided with a plurality of treating parts for treating bodies to be treated in a reduced pressure process and a normal pressure treating part 1 20 for treating in a normal pressure process the bodies to be treated before the treatment or after the treatment in this treating part 100 are coupled with each other through load-lock chambers 130. The treating part 100 is constituted by coupling a plurality of reduced pressure process treating chambers 10 with a reduced pressure transfer chamber 14, wherein a robot arm 16 is arranged, via gate valves 12. The treating part 120 is constituted by arranging a plurality of normal pressure process treating chambers 18 on the periphery of a robot arm 22. The chambers 130 are provided at positions where the ranges of transfer of the two robot arms 16 and 22 overlap each other.