发明名称 CONTROL SYSTEM
摘要 PROBLEM TO BE SOLVED: To solve the problems that a temperature gradient is generated due to the difference of the heating capacity of plural heaters 5 or the like and overshooting and undershooting due to the temperature gradient can not be effectively suppressed in the case of PID controlling the temperature of a thermostatic chamber 1 for instance by the plural heaters 5 in conventional PID control. SOLUTION: The output of one PID arithmetic circuit 12 is multiplied (13) by a prescribed ratio coefficient and the plural heaters 5 are controlled based on it.
申请公布号 JP2001318702(A) 申请公布日期 2001.11.16
申请号 JP20000135167 申请日期 2000.05.08
申请人 YAMATAKE CORP 发明人 HIRAYAMA HIROBUMI
分类号 H05B3/00;F24F5/00;G05B11/32;G05B11/36;G05D23/19;H01L21/205;(IPC1-7):G05B11/36 主分类号 H05B3/00
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