摘要 |
PROBLEM TO BE SOLVED: To reduce the size of a vacuum motor and facilitate the installation thereof into equipment by positioning a magnetic encoder in an encoder case on the vacuum side. SOLUTION: The sensor for vacuum motor comprises a magnetic gear wheel (22) installed on a rotating shaft (9) having a rotor (8), the encoder case (18) placed in the motor case (1), and a magnetic sensor (19) that is installed in the encoder case (18) and placed opposite to the magnetic gear wheel (22). The magnetic gear wheel (22) and the detecting face (19a) of the magnetic sensor (19) are positioned on the vacuum side (14). |