| 摘要 |
PROBLEM TO BE SOLVED: To provide a normal open type piezoelectric fluid control valve capable of obtaining a valve closing force due to a springing force of a spring by converting an elongation force of a piezoelectric element laminated body into the springing force of the spring and having excellent durability. SOLUTION: The piezoelectric element laminated body 20 elongating due to the application of a voltage is arranged between a diaphragm valve 11 to which an elastic force in the direction of valve opening is given and a valve spring mechanism 25, and a distortion amount (a) when the piezoelectric element laminated body 20 is elongated is set to be larger than an opening and closing stroke (b) of the diaphragm valve 11 so that a spring seat 28 leaves a second stopper 30 due to a difference c between them. Consequently, when the piezoelectric element laminated body 20 is elongated and the diaphragm valve 11 is seated on a valve seat 10, the spring 29 is compressed, its springing force acts on the diaphragm valve 11 through the piezoelectric element laminated body 20, and the diaphragm valve 11 is pressed against the valve seat 10 by the springing force. |
