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发明名称
METHOD AND DEVICE FOR BEAM MOVEMENT CONTROL
摘要
申请公布号
EP0925531(B1)
申请公布日期
2001.11.14
申请号
EP19970929191
申请日期
1997.06.16
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER<BR>ANGEWANDTEN FORSCHUNG E.V.
发明人
SCHWAAR, MICHAEL;KARCZEWSKI, ZENON;KORIATH, HANS-JOACHIM
分类号
G05B19/408;(IPC1-7):G05B19/408
主分类号
G05B19/408
代理机构
代理人
主权项
地址
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