METHOD AND APPARATUS FOR ELECTRON BEAM COLUMN ASSEMBLY WITH PRECISE ALIGNMENT USING DISPLACED SEMI-TRANSPARENT MEMBRANES,申请号EP20000959465-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR ELECTRON BEAM COLUMN ASSEMBLY WITH PRECISE ALIGNMENT USING DISPLACED SEMI-TRANSPARENT MEMBRANES
摘要
申请公布号	EP1153411(A1)	申请公布日期	2001.11.14
申请号	EP20000959465	申请日期	2000.08.25
申请人	ETEC SYSTEMS, INC.	发明人	SPALLAS, JAMES, P.;MURAY, LAWRENCE, P.
分类号	G03F7/20;H01J9/18;H01J37/04;H01L21/027;(IPC1-7):H01J37/04	主分类号	G03F7/20
代理机构		代理人
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