| 摘要 |
PURPOSE: A micro absolute humidity sensor and a method for manufacturing the same are provided to improve the sensibility of the sensor and a response speed by increasing the heat loss due to the change of humidity change and increasing the change of resistance of resistance elements. CONSTITUTION: A method for manufacturing a micro absolute humidity sensor includes the steps of forming a membrane(12) on a silicon substrate(11), forming a plurality of resistance thin films(13,13') having a temperature resistance coefficient on the membrane to form a sensing element and a compensation element, forming an electrode pad(14) for electrically connecting the resistance thin films to each other by contacting the resistance thin films, forming a protection film(15) on the resistance thin films and the electrode pad to expose both sides of the electrode pad, forming grooves(16,16') of a predetermined shape on the substrate below the resistance thin films, and forming a cap(17) joined to a top part of the compensation element and having a cavity.
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