| 摘要 |
PURPOSE: A slot valve actuator having a type of both wings is provided to reduce fabricating cost by having one actuator regarding two valves in a valve apparatus, and to make one of a transfer module and a process module operate while th other is operating by installing one valve apparatus between the transfer module and the process module adjacent to each other. CONSTITUTION: A housing has walls at its both sides having respective slots. The transfer module is installed in the wall at one side and the process module is installed in the wall at the other side. A material is transferred between the transfer module and the process module. The first door closes the first slot formed on the wall at the one side, installed in the housing and capable of moving. The second door closes the second slot formed on the wall at the other side, installed in the housing and capable of moving. One actuator selectively and separately drives one of the first and second doors to close the respective slots, connected to the first and second doors, respectively.
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