NON-SINGLE CRYSTAL FILM, SUBSTRATE THEREWITH METHOD AND DEVICE FOR MANUFACTURING THE SAME, INSPECTION DEVICE AND METHOD OF INSPECTING THE SAME, THIN-FILM TRANSISTOR FORMED BY USE THEREOF, THIN-FILM TRANSISTOR ARRAY AND IMAGE DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a non-single crystalline thin film, that is made more uniform in crystal grain diameter and improved in grain diameter periodicity. SOLUTION: This method of manufacturing a non-single crystalline film comprises a first process of optimizing laser irradiation and monitoring it with a diffracted light after the non-single crystal film is formed, and a second process of irradiating a substrate with a laser beam, keeping it in a cooled state.