发明名称 |
VAKUUMKAMMER AUS ALUMINIUM ODER SEINEN LEGIERUNGEN |
摘要 |
<p>The present invention relates to a vacuum chamber and chamber parts made of aluminum or its alloys which exhibit excellent corrosion resistance to a corrosive gas or plasma introduced into the vacuum chamber, the surface treatment, and material for the vacuum chamber. The vacuum chamber has a porous layer with a structure in which a pore diameter at the top thereof is small, while a pore diameter at the bottom thereof is large. In order to give such a structure to the porous layer, a final anodizing voltage is set to be higher than an initial anodizing voltage when the surface of the base material is anodized. After the porous-type anodizing is completed, non-porous type anodizing may be conducted so as to grow a barrier layer. Furthermore, the base material made of aluminum alloy preferably has particles such as precipitates and/or deposits with a diameter of 10 mu m or less in average, and the precipitates and/or deposits are arranged in parallel with a largest surface of the base material. <IMAGE></p> |
申请公布号 |
DE69522954(D1) |
申请公布日期 |
2001.10.31 |
申请号 |
DE1995622954 |
申请日期 |
1995.11.06 |
申请人 |
KABUSHIKI KAISHA KOBE SEIKO SHO (KOBE STEEL, LTD.) |
发明人 |
HISAMOTO, JUN;WADA, KOJI;IKEDA, KOKI;YANAGAWA, MASAHIRO |
分类号 |
B01J3/00;B01J19/02;C23C16/44;C25D11/04;C25D11/12;(IPC1-7):C25D11/04 |
主分类号 |
B01J3/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|