发明名称 CONTACTING PROBE OF CHARGING AND DISCHARGING DEVICE AND CHARGING AND DISCHARGING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To provide the contacting probe of a charging and discharging device and the charging and discharging method thereof, which prevent adhesion and deposition of dirt and dust to the top end of the contacting probe to prevent a contacting failure when the charging and discharging operation is done and enable executing the check of the performance and quality of a charged and discharged article, and therewith suppress the maintenance of the top end to a minimum to improve the operation rate of a facility and enhance the productivity. SOLUTION: The contacting probe 1 of the charging and discharging device is provided with a top end 3 of the contacting probe 1 that contacts a charged and discharged part 9 at the top end of the contacting probe body 2, where a fluid blowing mechanism 8 that blows fluid off to the top end 3 of the contacting probe 1 is annexed.
申请公布号 JP2001305158(A) 申请公布日期 2001.10.31
申请号 JP20000125952 申请日期 2000.04.26
申请人 SONY CORP 发明人 MATSUSHIMA HIDEKI
分类号 G01R1/06;G01R31/28;H01L21/66;H01M10/44;(IPC1-7):G01R1/06 主分类号 G01R1/06
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