| 摘要 |
PROBLEM TO BE SOLVED: To provide on optical lever type inclination detecting apparatus capable of detecting the inclination relative to an object to be detected, increasing the speed of focus adjustment of the optical system and heightening the accuracy. SOLUTION: This optical lever type inclination detecting apparatus is provided with an inclination detecting means for causing detecting light emitted from a light source 1 to enter the inclination detected object placed on an electrically driven part 8 through a collimator lens 5, and detecting the reflected light from the inclination detected object to detect the inclination of the inclination detected object to the optical axis of detected light, an optical axis aligning means for causing focus light emitted from a light source 11 different from the light source 1 to enter the inclination detected object on the electrically driven part 8 through the collimator lens 5 and observing the reflected light of the focus light and reflected light of the detected light by a CCD camera 9 to make optical axis alignment between the detected light and the focus light, and a focus adjusting means for detecting the reflected light of the focus light by a two-split detector 17, and varying the electrically driven part 8 to the focus lens in the direction of the optical axis according to the detection signal to focus the detecting light on the inclination detected object.
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