Method of producing single crystal thin film,申请号EP19960108506-传众专利搜索

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发明名称	Method of producing single crystal thin film
摘要
申请公布号	EP0746011(B1)	申请公布日期	2001.10.31
申请号	EP19960108506	申请日期	1996.05.29
申请人	SHIN-ETSU HANDOTAI COMPANY LIMITED	发明人	HABUKA, HITOSHI;MAYUSUMI, MASANORI
分类号	H01L21/205;(IPC1-7):H01L21/205;H01L21/306;C30B25/02;H01L21/20	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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