| 摘要 |
A containment system (1) for use in cleaning of an MBE chamber contains a two part housing in a clam-shell like structure with upper (5) and lower (7) housing sections that are latched together (8) with the walls defining a containment region. The housing is secured to the face of the MBE chamber with the source flange cover of that chamber received through an opening in the rear wall (13 & 19). A closure (28) permits opening or closing a front access opening in the housing through which the containment region may be accessed. The housing includes a exhaust vent tube (11). The containment system includes the means for detecting fire (34) in the confinement region and extinguishing the fires (35) and exhausting any gases through the vent tube.
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